iSurfa-310 Roughness Waviness Tester
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ISurfa 310图(1)
ISurfa 310图(2)
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ISurfa 310图(6) scaled
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Product Features & Applications

Product Features:

  • High-precision large-stroke guide rail with a length of up to 50mm.
  • Sensor measurement range: ±100μm.
  • Pad serves as the operating device, portable and ergonomic for operation.
  • Wireless WiFi communication enables remote operation and convenient usage.
  • Ethernet cable connection for communication, with automatic switching capability with WiFi, facilitating faster data transmission in workshops where wireless devices are inconvenient to use.
  • Comprehensive parameters, including 5 measurement types and multiple national standards.
  • Stylus can be directly replaced, with convenient replacement operation, enabling measurements in different scenarios.
  • Sensor can be freely switched between vertical and coaxial positions relative to the guide rail, allowing depth groove measurement from the side without being restricted by the depth of the stylus and groove.
  • Supports switching between metric and imperial units on the operating interface and result parameters.
  • Supports switching between Chinese and English interfaces.
  • Convenient data storage, allowing direct change of storage path to a USB flash drive or SD card inserted into the Pad. CSV data format facilitates easier data use with no upper limit on data storage.
  • Includes multiple filtering methods and analysis algorithms that can be freely combined to meet requirements.
  • Supports automatic multiple calibrations of standard blocks, significantly reducing calibration errors.

Product Applications:

  • Precision Machining: Used to detect the surface roughness and waviness of machined parts, ensuring product quality meets high-precision requirements.
  • Wafer Surface Inspection: In the semiconductor manufacturing process, measures the roughness and waviness of wafer surfaces to ensure chip quality and production efficiency.

Technical Specifications

Model

iSurfa-310

Range

X direction

50mm

Z direction

±1000μm

Sensor resolution

X direction

0.0016μm/±50μm ~ 0.016μm/±500μm

Driver

Straightness

1μm/50mm

Analysis

algorithm

Corresponding Standard

JIS-82, JIS-87, JIS-94, JIS-01, JIS- 13, ISO-84, ISO-97, DIN-90 , ASME-95 , GB-14

Parameters

Roughness profile

Ra75, Rq , Rp, Rv, Rc , Rt , S, R3z , PPI , Ra , Rsk , Rku, Ry, Sm , RΔa , RΔq , Rz , Pc , Rλa , Rλq , lr , RSm, Rz94, RPc , RS , Rz.I , Rpm , HSC

Waviness profile

WCA, WCC-q , WCC-p , WCC-v , WCC-m , WCC-Sm, WCA , WC-q , WC-p , WC-v , WCM , WC-Sm, WC-t, Wa , Wq, Wsk , Wku , Wp , Wv , Wz , Wc , Wt, WSm, WΔq , WPc

Primary profile

Rsk, Rku , Rmax , Sm , Δa , Δq , Rz , λa , λq , lr , TILT A, AVH , Hmax , Hmin , AREA , Rz.J , Pa , Pq, Psk, Pku, Pp , Pv , Pc.I , Pt , PSm , PΔq , PPc, Pc

Abbott curve

Rk, Rpk, Rvk, Mr1, Mr2, V0, K, A1, A2

Motif

NCRX , AR, R, Rx , NR, CPM , SR, SAR, AW , W, Wx, Wte , NW , SW , SAW, Rke , Rpke , Rvke , Mr1, Mr2, V0, K

Evaluation curve

Roughness profile, Waviness profile, Primary profile, Abbott curve, Motif

Characteristic curve

Abbott curve(Rmr(c) , Rmr2(c) , Rδc(c) , tp(c), tp2(c), Htp(c)) , Amplitude frequency analysis curve, amplitude distribution curve

Form remove

global, first half, second half, center, 2 points, curve

Filter type

Gaussian, FFT , PC , DP, 2RC

Filter

wave

length

λs

0 , 2.5 , 8 , 25μm

λc

0.08 , 0.25 , 0.8 , 2.5 , 8mm

λf

0.8 , 2.5 , 8 , 25m

Evaluation length

Sampling length × number of samples

(sampling length has standard mode and custom mode)

Measurement speed

0.05mm/s , 0. 10mm/s , 0.50mm/s , 1.00mm/s , 2.00mm/

Return speed

0.05mm/s , 0. 10mm/s , 0.50mm/s , 1.00mm/s , 2.00mm/

Sensor

Mode

Standard universal type

Sensor mode

Differential inductance

Range

±1000μm

Stylus

5μmR diamond 90°

Contact Force of the Stylus

Adjustable from 0.4 to 0.75mN

Operator

Display part

10-inch color IPS touch screen

Data output

TF card/U disk/WIFI printing

Corresponding language

Chinese/English

Dimensions and Weight

Power supply

AC220V±10%

Built-in Rechargeable Battery (Charged via AC Transformer)

Charging Time: 8 Hours

Power consumption

About 30VA (Capable of 800 measurements after being fully charged)

Quality

N.W 4Kg

G.W 8Kg

Dimensions

Actuator 80 (W) ×392 (L) × 180 (H)

Operator 245 (W) × 162 (D) ×68 (H)

Standard Configuration

Name

Qty

Photo

Host Actuator

1 Unit

Sensor

1 PC

10-inch Pad Operator

1 Unit

Host charger

1 PC

/

Pad charger

1 PC

/

Standard stylus

1 PC

Roughness standard test block

1 PC

Data communication line

1 PC

/

Host waterproof case

1 PC

/

Random tools

Allen wrench (1.5mm and 2.5mm)

/

Product certificate

1 Copy

Product manual

1 Copy

Warranty card

1 Copy

Optional Configuration

Name Photo
X-Y Axis Test Table
Fixture
V-shaped Test Table
Stylus
Measurement Platform
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